OEM high purity porous metal 316L chamber diffusers and filters
HENGKO OEM Gas Chamber Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity cycles.
TYPICAL APPLICATIONS
Chamber Diffusers are used for venting in the following applications:
• transfer chambers
• cooling chambers
• process chambers
of semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers
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OEM high-purity porous metal stainless steel 316L chamber diffusers and filters
1. Accurate pore size, uniform, and even-distributed apertures. Pore size range: 0.1um to 120 micron;
2. Good breathability, fast gas & liquid flow rate, and uniform divergence. it is far superior to other peer products with the optimization of special processes in HENGKO.
3. Good filtration dustproof and interception effect, high filtration efficiency. The pore size, speed of the flow, and other performances can be customized as requested;
4. High supporting load capacity, no need to use other auxiliary supports, can be directly used as structural elements;
5. Stable structure, particles are tightly bound without migration, almost inseparable under harsh environments;
6. High fatigue strength and impact stress, high pressure resistant, suitable for applications with high pressure difference and flow rate. Sintered porous stainless steel filter elements for long-term usage under high pressure fluid (40mpa) conditions are available;
7. Resistance to high temperature and heat shock. HENGKO stainless steel filter elements can operate at 600 degrees Celsius, can withstand high temperature even in oxidized atmospheres;
8. Excellent functions of separation and noise reduction as a result of special multidimensional honeycomb nested capillary structure;
9. Different from other peers, HENGKO stainless steel filter elements haven't been corroded in a variety of environments. The performances of anti-corrosion and rust-proof are close to dense stainless steel products;
10. More than 10K product sizes and types to choose from, customizable as needed for stainless steel filtering products with multiple complex structures;
11. Tiny diameter( 5-20 mm), the length for long filter tube can be up to 800 mm;
12. The processable dimension for plate filter can be up to L 800 * W 450 mm;
13. The maximum diameter for a disc filter can be up to 450 mm;
14. Exquisite product appearance will upgrade your product level and image greatly as apparent parts;
15. A variety of cleaning methods are available, strong regeneration ability after reverse cleaning, long service life.
