high purity filters

High Purity Inline Gas Filter for Semiconductor UHP Systems 

HENGKO high purity filters are engineered for ultra-clean gas and fluid filtration in semiconductor,

specialty gas, pharmaceutical, and high-purity industrial applications.

Manufactured from sintered porous 316L stainless steel and all-metal filtration media, our filters provide

reliable particle retention, low outgassing, high pressure resistance, and excellent corrosion resistance

for demanding UHP process environments.

We offer OEM high purity filtration solutions including inline filters, gasket filters, gas purifiers, chamber diffusers,

and point-of-use filters for ultra-high purity gas systems.

Request an OEM High Purity Filters Quote

You Are Welcome to Contact Us to Show Your Filter Design by email  

ka@hengko.com, We Will Discuss with Filter R&D Team and Supply 

Solution for Your Special Filtration within 48-Hours.