Semiconductor Vacuum Chamber Gas Diffuser Filter – 316L Stainless Steel

Short Description:

Brand: HENGKO

Filter Name: High Purity Gas Diffuser - DF series

Material: SS 316L

Max. operating working pressure difference: 4-bar

Max. operating temperature: 400° C

Particle removal size: > 0.003 μm

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316L Stainless Steel Vent Diffuser Filter for Semiconductor Vacuum Chambers

HENGKO semiconductor vent diffuser filters combine a sintered 316L stainless steel porous element with a gas-distribution design for controlled venting and particle management in vacuum process chambers. Available in disc and cartridge configurations with ISO NW vacuum flange options, these components support equipment integration where clean gas delivery and reduced localized gas jets are important.

At a glance: 316L stainless steel media and housing | Disc and cartridge designs | ISO NW16, NW25, NW40 and NW50 configurations (model-dependent) | Custom integration support

HENGKO 316L semiconductor vacuum chamber vent diffuser filter

Key Features and Engineering Benefits

Porous gas distribution: Sintered stainless steel media helps distribute incoming vent gas and reduce concentrated jets near sensitive chamber surfaces.

Particle management: Porous filtration media is intended to reduce particulate introduction into the chamber; specify the required retention efficiency and test conditions.

316L stainless steel construction: The listed filter medium and housing use 316L stainless steel for mechanical durability and corrosion resistance in compatible gas environments.

Disc and cartridge options: Choose a compact disc arrangement or a longer cartridge configuration based on chamber space and desired flow characteristics.

Vacuum flange integration: Listed models include ISO NW16, NW25, NW40 and NW50 flange configurations; verify mating seals and connector geometry.

Custom engineering: Discuss dimensions, flange interfaces, gas type, venting rate and cleanliness documentation for OEM equipment projects.

Technical Specifications

Parameter	Original Datasheet Value	Engineering Note
Filter medium	316L sintered stainless steel	As supplied in original product information
Housing	316L stainless steel	Confirm wetted material and weld details
Inner surface roughness	Ra ≤ 32 μm	Verify measurement surface and finish requirement
Filtration rating	Original claim: ≥ 0.003 μm	Requires clarification of particle size, removal efficiency and test method
Maximum inlet pressure	4 bar	Confirm whether gauge or absolute pressure
Maximum operating differential pressure	5 bar	Confirm allowable pressure direction and operating envelope
Maximum operating temperature	400 °C	Confirm assembly, seal and flange temperature limits
Downstream cleanliness	≤ 0.03 particles/L at > 0.01 μm, rated flow	Confirm test gas, method, upstream challenge and test report

Technical values above reproduce the supplied product data and are not independently verified. Confirm the latest approved drawing and test report before using them as contractual performance limits.

Disc-Type Vent Diffuser Filters

Disc-type designs offer a compact porous surface for vacuum chamber vent-gas distribution. Select the appropriate ISO NW flange and confirm available installation clearance.

Disc type semiconductor vent diffuser filter dimensional drawing

Disc-Type Model Dimensions

Product Model	Inlet Specification	Outlet Specification	Total Length (A)	Filter Element OD (φB)	Housing OD (φC)
Z01B-00639	1/4’’	ISO NW40 Vacuum Flange	42mm (1.64’’)	Φ39mm (1.53’’)	Φ55mm (2.16’’)
Z01B-00695	1/4’’	ISO NW50 Vacuum Flange	42mm (1.64’’)	Φ52mm (2.05’’)	Φ75mm (2.95’’)

Cartridge-Type Vent Diffuser Filters

Cartridge-type elements provide an extended porous element length for configurations that require a different gas distribution area or installation geometry.

Cartridge type semiconductor vent diffuser filter dimensional drawing

Cartridge-Type Model Dimensions

Product Model	Inlet Specification	Outlet Specification	Total Length (A)	Filter Element OD (φB)	Housing OD (φC)	Filter Tube Length (D)
Z01B-00697	1/4’’	ISO NW16 Vacuum Flange	81mm (3.18’’)	Φ16mm (0.64’’)	Φ30mm (1.18’’)	44mm (1.74’’)
Z01B-00501	1/4’’	ISO NW16 Vacuum Flange	104mm (4.08’’)	Φ16mm (0.64’’)	Φ30mm (1.18’’)	67mm (2.64’’)
Z01B-00698	1/4’’	ISO NW16 Vacuum Flange	135mm (5.30’’)	Φ16mm (0.64’’)	Φ30mm (1.18’’)	98mm (3.86’’)
Z01B-00699	1/4’’	ISO NW25 Vacuum Flange	81mm (3.18’’)	Φ16mm (0.64’’)	Φ40mm (1.58’’)	44mm (1.74’’)
Z01B-00700	1/4’’	ISO NW25 Vacuum Flange	104mm (4.08’’)	Φ16mm (0.64’’)	Φ40mm (1.58’’)	67mm (2.64’’)
Z01B-00701	1/4’’	ISO NW40 Vacuum Flange	104mm (4.08’’)	Φ16mm (0.64’’)	Φ55mm (2.16’’)	67mm (2.64’’)

Typical Semiconductor Applications

Vacuum chamber venting: Distributing filtered nitrogen or another qualified vent gas when returning a process chamber toward atmospheric pressure.

Semiconductor process equipment: Integration into chamber gas inlet or venting assemblies where particle control and gas distribution are critical.

OEM vacuum systems: Custom vent diffuser components for equipment builders using ISO NW flange interfaces.

Semiconductor manufacturing gas filtration and vacuum chamber applications

How to Select a Vent Diffuser Filter

Specify the vent gas and purity, chamber volume, starting and final chamber pressure, target venting time, maximum allowable pressure drop, flow profile, flange size, available installation space, temperature and required particle cleanliness. These factors determine whether a disc or cartridge configuration is appropriate.

OEM Customization and Quality Documentation

HENGKO can review drawings and application requirements for custom dimensions, porous element geometry and connection interfaces. Request available inspection, helium leak test, cleanliness and packaging documentation for the specific part number. Do not assume a cleanroom class or 100% testing protocol without written confirmation.

Frequently Asked Questions

What is a semiconductor vent diffuser filter?

It is a porous gas-distribution and filtration component used in vacuum chamber venting systems to moderate incoming gas jets and help manage particles.

What is the difference between a vent diffuser and a gas flow restrictor?

A diffuser distributes gas across a porous area; a restrictor primarily sets or limits flow. Actual venting performance depends on the entire gas path and pressure conditions.

Are disc and cartridge types interchangeable?

Not automatically. They differ in dimensions and porous geometry. Compare flange interfaces, flow requirements, pressure drop and chamber clearance.

Can the filter be used with nitrogen?

Nitrogen venting is a potential application, subject to gas compatibility, cleanliness requirements and validated operating conditions.

Is the filter rated to remove 0.003 μm particles?

The source datasheet includes a 0.003 μm claim, but does not define removal efficiency or test method. Request validated performance data before specifying this rating.

What information is needed for an OEM quotation?

Send the target part number or drawing, flange size, gas type, flow and pressure conditions, temperature, required cleanliness level, quantity and delivery destination.

Request a Semiconductor Vent Diffuser Filter Quote

Send your chamber application, required flange size, flow and pressure conditions, model number or technical drawing, and estimated order quantity. Our team can review a suitable disc, cartridge or custom configuration.

Request Technical Consultation & Quote